Dry Asher Etcher RIE ICP Equipment > Lam Research AutoEtch 590/490/690 Oxide Etcher(Danville, CA)

Dry Asher Etcher RIE ICP Equipment > Lam Research AutoEtch 590/490/690 Oxide Etcher Please contact us by sales@globalnanotechequipment.com for more information. Manufacturer:Lam Research Condition:Refurbished to OEM SPEC(Installation and warranty are optional) Price:Contact Us Now Location:California,USA Amount: 4 sets Description for reference only(One of the unit). Wafer Size Capacity:4 to 6 inch The system includes the following. 1. Send Indexer 2. Receive Indexer 3. Entrance Lifter 4. Exit Lifter 5. 4 Pin Lifter 6. Gap Assembly 7. Lower Match Assembly 8. Upper Electrode Assembly 9. Lower Electrode Assembly 10. 5 MFC Gas Box 11. Main Power Supply 12. Main Chamber Generator 13. 2 Recipe Modules, 2 Master Modules 14. Front & Rear EMO Switches 15. Panels & Plexi Glass Covers (Standalone System) 16. Main Chamber, Hex Plate, Orifice Ring, Pump Ring 17. 2 Channel Endpoint Detector Please also refer to Lam Research 4520 Rainbow Oxide Etcher; Lam Research 4420 Rainbow Nitride Poly Etcher;Lam Research AutoEtch 490 Nitride Poly Etcher. Please contact us by http://www.globalnanotechequipment.com sales@globalnanotechequipment.com for more information.